Photoresist reflow method of microlens production Part II: Analytic models |
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Authors: | Feidhlim T. O'NeillJohn T. Sheridan |
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Affiliation: | a Department of Electronic and Electrical Engineering, University College Dublin, Belfield, Dublin 4, Republic of Ireland |
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Abstract: | |
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Keywords: | Microlens curvature photoresist modelling |
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