| 轴向填充率渐变型二维光子晶体 |
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| 引用本文： | 周建伟,梁静秋,梁中翥,王维彪.轴向填充率渐变型二维光子晶体[J].发光学报,2012,33(10):1112-1119. |
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| 作者姓名： | 周建伟 梁静秋 梁中翥 王维彪 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;中国科学院大学 |
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| 基金项目： | 国家自然科学基金(60877031)资助项目 |
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| 摘 要： | 提出了一种轴向填充率渐变型二维三角晶格方空气孔光子晶体,由锥形孔周期性排布而成,在第三维也就是沿空气孔的轴向,空气孔的尺寸连续改变,实现了填充率渐变,填充率f范围为0.700～0.866。经过模拟,在归一化波长(λ/a)的1.43～2.71和3.41～4.00波段,轴向填充率渐变型光子晶体可以将光向填充率小的方向偏折,具有选光功能。采用电化学腐蚀与MEMS工艺相结合的方式,在p型(100)硅基底上制作了轴向填充率渐变型二维三角晶格方孔光子晶体,整个孔的填充率f在0.800～0.866范围内。
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| 关 键 词： | 二维光子晶体 轴向填充率渐变 电化学腐蚀 |
| 收稿时间： | 2012/7/4 |
Axially Filling Rate Graded Two-dimensional Photonic Crystals |
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| ZHOU Jian-wei,LIANG Jing-qiu,LIANG Zhong-zhu,WANG Wei-biao.Axially Filling Rate Graded Two-dimensional Photonic Crystals[J].Chinese Journal of Luminescence,2012,33(10):1112-1119. |
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| Authors: | ZHOU Jian-wei LIANG Jing-qiu LIANG Zhong-zhu WANG Wei-biao |
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| Institution: | 1 (1.State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China; 2.University of Chinese Academy of Sciences,Beijing 100039,China) |
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| Abstract: | This paper presents a kind of axially filling-factor graded 2D triangular lattice air holes photonic crystals.The PC is periodically composed of conical holes.The size of air holes continuously changes along the axis of air holes.The filling-factor changes from 0.700 to 0.866.Simulation results show that in range of normalized wavelength(λ/a) 1.43～2.71 and 3.41～4.00,the horizontal incident light is deflected to the bottom of photonic crystals as well as the small filling rate part.The sample has the function of splitting light.And axially filling-factor graded 2D triangular lattice air holes photonic crystals are prepared on p-Si(100) wafers by electrochemical etching and MEMS technique,the filling rate ranging from 0.800 to 0.866. |
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| Keywords: | two-dimensional photonic crystals axially filling-factor graded electrochemical etching |
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