|
|||||
|
|
A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering |
|
| Authors: | Cho Jui Tay Chenggen Quan |
| Affiliation: | a Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260 |
| Abstract: | |
| Keywords: | Surface roughness laser scattering Laser diode semi-conductor wafers |
| 本文献已被 ScienceDirect 等数据库收录！ | |