Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition |
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Authors: | Guoqiang Xie Minghui Song Kazutaka Mitsuishi Kazuo Furuya |
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Institution: | High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan |
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Abstract: | Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains. |
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Keywords: | Electron-beam-induced deposition Nanodendrite Accelerating voltage Crystallization |
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