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SOI波导反射模式的古斯-汉欣空间位移效应及其数字式热光开关
引用本文:陈卓,李天成,孙德贵,孙娜,尚鸿鹏,陈晨. SOI波导反射模式的古斯-汉欣空间位移效应及其数字式热光开关[J]. 光子学报, 2021, 50(4): 111-119
作者姓名:陈卓  李天成  孙德贵  孙娜  尚鸿鹏  陈晨
作者单位:长春理工大学 理学院,长春 130022;长春长光圆辰微电子技术有限公司,长春 130022
基金项目:Human Resources and Social Security Talent Plan Fund of Jilin Province(No.634190874002);Natural Science Foundation of Jilin Province(No.20180101223JC)。
摘    要:借助波导转角镜结构,利用古斯-汉欣空间位移和热光效应折射率调制的有效组合,提出了波导反射模式数字式热光开关结构.在给定入射角的条件下优化了空间古斯-汉欣位移,在具有古斯-汉欣效应的本征态下,反射光束出现了较大的跳跃.在1.0μm厚硅膜的绝缘体上硅平台上,单模输入波导和多模干涉波导结构之间的导模本征态匹配,验证了1×3数...

关 键 词:数字式光开关  热光效应  古斯-汉欣效应  SOI波导

Digital Thermo-optic Switch of SOI Waveguide Based on Goos-Hanchen Spatial Shift of Reflected Mode
CHEN Zhuo,LI Tiancheng,SUN Degui,SUN Na,SHANG Hongpeng,CHEN Chen. Digital Thermo-optic Switch of SOI Waveguide Based on Goos-Hanchen Spatial Shift of Reflected Mode[J]. Acta Photonica Sinica, 2021, 50(4): 111-119
Authors:CHEN Zhuo  LI Tiancheng  SUN Degui  SUN Na  SHANG Hongpeng  CHEN Chen
Affiliation:(School of Science,Changchun University of Science and Technology,Changchun 130022,China;Changchun Changguang Yuanchen Microelectronics Technology Co.Ltd,Changchun 130022,China)
Abstract:With the waveguide corner mirror structure and the effective combination of the Goos-Hanchen(GH)spatial shift and the thermo-optical effect refractive index modulation,a digital thermo-optical switch structure of waveguide reflected mode is proposed.The GH spatial shift is optimized under the condition of a given incident angle,and the reflected beam has a larger jump under an eigenstate with the GH effect.On a silicon-on-insulator platform with a 1.0μm thick silicon film,the guided mode eigenstate matching between the single-mode input waveguide and the multimode interference waveguide structure verifies the function of a 1×3 digital optical switch.In experiment,the optical loss caused by the device structure is 0.3 dB,the switching power is 130~150 mW,the switching time is about 50μs,and the isolation between adjacent output ports is 15 dB.The comparison with the latest results of the MachZehnder interferometer 2×2 thermo-optic switch and the newly emerging plasma effect thermo-optic switch shows the advancement of this digital TO switch.
Keywords:Digital optical switch  Thermo-optic effect  Goos-Hanchen effect  SOI waveguide
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