实现微位移测量的非本征法布里-珀罗干涉型光纤传感器

从光纤耦合和多光束干涉的原理出发,建立了非本征型法布里_珀罗干涉仪光纤传感器的理论模型,得到了用光谱法进行绝对距离测量的公式。设计出了传感器探头的结构,并搭建了系统。用LED作为宽带光源所得到的反射光谱可用于实际样品的微位移测量。实验结果表明,该传感器理论模型的数值模拟结果与实验结果是一致的。对实验数据进行了误差分析,所得到的测量精度可达到1μm。

Optical fiber extrinsic Fabry-Perot interferometric sensor for measuring tiny displacement

Based on the theory of optical fiber coupling and Fabry_Perot interference, a theoretical model of extrinsic Fabry_Perot interferometric (EFPI) optical fiber sensor was demonstrated, a formula which was used to measure absolute displacement through spectrum was attained. The structure of the optical fiber sensor was designed, and the experimental setup was constructed. LED was used as broad_band source to attain reflection spectrum and measure tiny_displacement of practical sample. The experimental results show that it is coincident well with the computational simulation of theoretical model. The error of experimental data is analyzed. Its measuring accuracy can reach 1μm.