一种同步移相干涉测量系统的误差研究

根据偏振光的琼斯矩阵理论,分析了一种基于二维光栅分光的同步移相干涉测量系统的工作原理。从干涉系统、分光系统以及移相系统三个部分详细研究了该系统的误差产生原因和作用机理,并针对各种误差源提出了相应的解决办法,为同步移相干涉测量系统中光学元件的选择、光路的调整及其误差的补偿提供了理论依据。结果表明,干涉部分的误差影响较小,可以通过光路的设计降低分光部分的误差;移相系统的误差最大,必须要对移相误差进行标定。

Errors researching for a simultaneous phase shifting interferometer

Working principle of a simultaneous phase-shifting interferometry based on a 2-dimensional grating is analyzed with Jones Matrix theory.The error sources of this system are researched from three parts: interferometry structure,sliptting structure and phase-shifting structure.And the settle for these error sources are proposed.So the academic basis for the elements choosing、beam path adjusting and errors compensating in simultaneous phase-shifting interferometer is presented.The results show that the error produced by interferometry structure is little and the errors produced by splitting structure may be depressed by beam path designing,while the errors produced by phase-shifting structure are the most and must be made certain.