| 高温MEMS剪应力传感器残余应力分析 |
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| 引用本文： | 纪科星,宋宏伟,范学军. 高温MEMS剪应力传感器残余应力分析[J]. 力学与实践, 2010, 32(1): 60-63. DOI: 10.6052/1000-0879-2008-542 |
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| 作者姓名： | 纪科星 宋宏伟 范学军 |
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| 作者单位： | 中国科学院力学研究所，北京，100190中国科学院力学研究所，北京 100190 |
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| 基金项目： | 总装备部预研基金项目;;国家自然科学基金资助(10502049) |
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| 摘 要： | 采用理论分析与数值模拟相结合的方法,研究了残余应力对静电反馈式MEMS高温剪应力传感器的结构设计的影响.研究表明:在电极宽度和间距不变的情况下,增加电极数和减小电极长度可有效地减小由静电力引起的应力和变形;残余应力对结构应力和变形的影响远大于静电力.
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| 关 键 词： | MEMS 剪应力传感器 残余应力 |
| 收稿时间： | 2008-11-05 |
RESIDUAL STRESS IN HIGH TEMPERATURE MEMS SHEAR STRESS SENSOR |
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| JI Kexing , SONG Hongwei , FAN Xuejun. RESIDUAL STRESS IN HIGH TEMPERATURE MEMS SHEAR STRESS SENSOR[J]. Mechanics and Engineering, 2010, 32(1): 60-63. DOI: 10.6052/1000-0879-2008-542 |
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| Authors: | JI Kexing SONG Hongwei FAN Xuejun |
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| Affiliation: | 2;Institute of Mechanics/a>;Chinese Academy of Sciences/a>;Beijing 100190/a>;China |
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| Abstract: | The effect of residual stress on the structural design of high temperature MEMS shear stress sensor is analyzed both theoretically and numerically.It is found that under the condition of constant electrode width and electrode gap,the increase of electrode number and the decrease of electrode length will effectively reduce the electrostatic-force induced stress and deformation.The residual stress originated from MEMS fabrication, however,shows much stronger influence on the stress and deformation than that o... |
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| Keywords: | MEMS shear stress sensor residual stress finite element |
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