高电阻率多层纳米颗粒膜软磁特性及微波磁导率

研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率.采用多次顺序沉积Co₄₀Fe₄₀B₂₀和SiO₂薄层制备了薄膜.在100kA/m均匀面内磁场经过250℃真空退火2h，制备的Co₄₀Fe₄₀B₂₀/SiO₂多层膜具有难轴矫顽力为210A/m、饱和磁化强度为838.75kA/m、电阻率为2.06×10^{3关键词： 纳米颗粒膜 电阻率 软磁特性 微波磁导率}

Soft magnetic properties and microwave permeability of multilayer nanogranular films with high resistivity

The resistivity, soft magnetic properties and microwave permeability of multilayer nanogranular films suitable for high frequency applications have been investigated in this work. These films were prepared by repeated sequential depositions of thin layers of Co₄₀Fe₄₀B₂₀ and SiO₂. After vacuum annealing at 250℃ under a uniform in-plane magnetic field of 100kA/m for 2h, the Co₄₀Fe₄₀B₂₀/SiO₂ multilayer films have the hard axis coercivity of 210A/m, saturation magnetization of 838.75kA/m, resistivity of 2.06×10³μΩcm. Moreover, the results show that the films have an in-plane uniaxial anisotropy of 2.78kA/m. As a consequence, the real part of measured permeability keeps constant at 125 up to 1.6GHz. The resonance frequency was about1.73GHz.