| Study on the Phase Detecting Laser Interferometric System with Computer Generated Hologram |
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| 作者姓名： | DAI Xiaofang CHEN Xingwu WEI Yaolin CHEN Benzhi WU Jizeng |
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| 作者单位： | College of Precision Instrument and Optoelectronic，Tianjin 300072，China |
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| 基金项目： | Supported by Technical Development Foundation of the Ministry of Machine-Building. |
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| 摘 要： | ＳｔｕｄｙｏｎｔｈｅＰｈａｓｅＤｅｔｅｃｔｉｎｇＬａｓｅｒＩｎｔｅｒｆｅｒｏｍｅｔｒｉｃＳｙｓｔｅｍｗｉｔｈＣｏｍｐｕｔｅｒＧｅｎｅｒａｔｅｄＨｏｌｏｇｒａｍ￥ＤＡＩＸｉａｏｆａｎｇ；ＣＨＥＮＸｉｎｇｗｕ；ＷＥＩＹａｏｌｉｎ；ＣＨＥＮＢｅｎｚｈｉ；Ｗ...
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| 收稿时间： | 1996/2/8 |
Study on the Phase Detecting Laser Interferometric System with Computer Generated Hologram |
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| DAI Xiaofang, CHEN Xingwu, WEI Yaolin, CHEN Benzhi, WU,Jizeng.Study on the Phase Detecting Laser Interferometric System with Computer Generated Hologram[J].中国激光(英文版),1996,5(6):541-546. |
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| Authors: | DAI Xiaofang CHEN Xingwu WEI Yaolin CHEN Benzhi WU Jizeng |
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| Abstract: | A Phase detecting interferometric system with computer generated hologram(CGH) recently built is dedcribed. Its optical system and CGH interference field are discussed. Based upon the phase detecting technique and fitting processing method of digital wave front, the system can realize measurement with high accuracy. The experimental results show that a precislon of λ/20 can be obtained in measuring aspheric surface. |
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| Keywords: | computer generated hologram (CGH) interference field real-time phase detedting technique |
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