| 一种基于CCD的实时测量光栅常数的方法 |
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| 引用本文： | 付赛,陈海清. 一种基于CCD的实时测量光栅常数的方法[J]. 应用光学, 2005, 26(1): 53-55 |
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| 作者姓名： | 付赛 陈海清 |
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| 作者单位： | 华中科技大学,光电系,湖北,武汉,430074 |
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| 基金项目： | 国家中小企业创新基金项目 (0 1 C2 62 1 42 0 0 3 84) |
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| 摘 要： | 光栅常数是检验光栅质量的重要参数之一.该文介绍了一种实时检测光栅参数的方法,即利用面阵CCD采集光栅衍射图像信息,通过计算衍射±1级光斑与主极大光斑的能量比得出光栅常数.这种方法具有检测速度快、系统简单、精度高等特点,可用于生产线上光栅的实时检测.
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| 关 键 词： | 光栅常数 面阵CCD 实时检测 |
| 文章编号： | 1002-2082(2005)01-0053-03 |
| 收稿时间： | 2003-12-10 |
A New Method Based on CCD to Measure the Constant of Grating |
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| FU Sai,CHEN Hai-qing. A New Method Based on CCD to Measure the Constant of Grating[J]. Journal of Applied Optics, 2005, 26(1): 53-55 |
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| Authors: | FU Sai CHEN Hai-qing |
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| Affiliation: | Department of Optronics, Huazhong University of Science and Technology, Wuhan 430074, China |
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| Abstract: | The constant of grating is one of the most important parameters to assess the quality of grating.A new method to measure the constant of grating is discussed in the paper. The information of a diffractive image is captured by planar-array CCD.The constant of grating can be got by calculating the power ratio of the main facula to the ±1~astafacula.With the advantages of the quick detection, simple structure and high precision,the method can be used in real-time measurement of the quality of gratings in production process. |
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| Keywords: | constant of grating planar-array CCD real-time measurement |
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