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用双光束干涉制作二维光子晶体
引用本文:李景娟,张新平,翟天瑞,王丽,江少林,王越. 用双光束干涉制作二维光子晶体[J]. 大学物理, 2012, 31(5): 54-57
作者姓名:李景娟  张新平  翟天瑞  王丽  江少林  王越
作者单位:北京工业大学应用数理学院,北京,100124
摘    要:利用双光束干涉,在光敏材料上制作光子晶体结构.通过改变两束光之间的夹角可以改变制备样品的周期.改变曝光次数以及两次曝光时干涉条纹的夹角可以分别得到一维、二维正方晶格以及二维三角晶格结构的光子晶体.

关 键 词:双光束干涉  干涉光刻  光子晶体制作

Fabrication of two-dimensional photonic crystal by double-beam interference
LI Jing-juan , ZHANG Xin-ping , ZHAI Tian-rui , WANG Li , JIANG Shao-lin , WANG Yue. Fabrication of two-dimensional photonic crystal by double-beam interference[J]. College Physics, 2012, 31(5): 54-57
Authors:LI Jing-juan    ZHANG Xin-ping    ZHAI Tian-rui    WANG Li    JIANG Shao-lin    WANG Yue
Affiliation:(College of Applied Sciences,Beijing University of Technology,Beijing 100124,China)
Abstract:The fabricate photonic crystal on photosensitive material is proposed by double-beam interference.The period of the structure can be controlled by changing the angle between two beams.The one-dimensional grating structure and two-dimensional photonic crystals with square lattice and triangular lattice should be obtained by changing the time of exposure and the angle between the interference fringe of two exposures.
Keywords:double-beam interference  interference lithography  fabrication of photonic crystal
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