Patterned aluminum nanowires produced by electron beam at the surfaces of AlF3 single crystals

Cubic- and rectangular-shape single crystals of α-AlF₃ in sizes of 5-50 μm have been synthesized by a solid-vapor phase process. Using the electron beam induced decomposition of AlF₃, a method is demonstrated for fabricating patterned aluminum nanowires in AlF₃ substrate in a scanning electron microscope. By controlling the accelerating voltage, the beam current and scanning time, it is possible to fabricate metallic nanowires of different sizes. The aluminum nanowires may act as nano-interconnects for nanoelectronics. This work demonstrates a potential technique for e-beam nanofabrication.