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Ar环境气压对纳米Si晶粒成核区范围的影响
引用本文:褚立志,邓泽超,丁学成,赵红东,王英龙,傅广生.Ar环境气压对纳米Si晶粒成核区范围的影响[J].物理学报,2012,61(10):108102-108102.
作者姓名:褚立志  邓泽超  丁学成  赵红东  王英龙  傅广生
作者单位:1. 河北工业大学信息工程学院,天津300401/河北大学物理科学与技术学院,保定071002
2. 河北大学物理科学与技术学院,保定,071002
3. 河北工业大学信息工程学院,天津,300401
基金项目:国家重点基础研究发展计划(批准号: 2011CB612305)、 国家自然科学基金(批准号: 10774036)、 河北省自然科学基金(批准号: E2008000631, E2011201134) 和河北省光电信息材料重点实验室资助的课题.
摘    要:为了研究不同环境气压条件下纳米Si晶粒成核区的范围,采用波长为308 nm的 XeCl脉冲准分子激光器,分别在1-200 Pa的Ar气环境下, 烧蚀高阻抗单晶Si靶,在距离烧蚀点正下方2.0 cm处水平放置一系列单晶Si 或玻璃衬底,沉积制备了纳米Si薄膜. Raman谱和X射线衍射谱测量证实了薄膜中纳米Si晶粒已经形成. 扫描电子显微镜的测量结果表明,环境气压的变化影响了衬底上纳米Si晶粒的平均尺寸及其分布范围. 根据成核区位置的确定方法,计算得出随着环境气压的增加纳米Si晶粒成核区的范围先变宽后变窄的规律. 从烧蚀动力学的角度对实验结果进行了分析.

关 键 词:脉冲激光烧蚀  纳米Si晶粒  环境气压  成核区
收稿时间:2011-06-09

Influence of the ambient pressure of Ar on the range of nucleation area of Si nanoparticles
Chu Li-Zhi,Deng Ze-Chao,Ding Xue-Cheng,Zhao Hong-Dong,Wang Ying-Long,Fu Guang-Sheng.Influence of the ambient pressure of Ar on the range of nucleation area of Si nanoparticles[J].Acta Physica Sinica,2012,61(10):108102-108102.
Authors:Chu Li-Zhi  Deng Ze-Chao  Ding Xue-Cheng  Zhao Hong-Dong  Wang Ying-Long  Fu Guang-Sheng
Institution:1. College of Information Engineering, Hebei University of Technology, Tianjin 300401, China; 2. College of Physics Science and Technology, Hebei University, Baoding 071002, China
Abstract:In order to investigate the range of nucleation area of Si nanoparticles under different pressures, a single crystalline Si target with high resistivity is ablated by a XeCl excimer laser (wavelength 308 nm, laser fluence 3 J/cm2) in an ambient pressure range from 1 to 200 Pa of pure Ar gas. The Si nanocrystalline films are systemically deposited on glass or single crystalline Si substrates that are lined up at a distance of 2.0 cm under the ablation point. Raman and X-ray diffraction spectra indicate that the films are nanocrystalline. Scanning electron microscope images of the films show that the ambient pressure effect on the average size and the distributing range of Si nanoparticles on the substrate. According to the method of determining the location of nucleation area, it is found that the range of nucleation area of Si nanoparticles first broadens and then narrows with the increase of ambient pressure. The dynamics is analysed theoretically to explain the results.
Keywords:pulsed laser ablation  Si nanoparticles  ambient pressure  nucleation area
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