| 不同工艺制备的高反射薄膜在真空与大气环境下的激光损伤特性 |
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| 引用本文： | 马平,陈松林,胡建平,王震,邵建达.不同工艺制备的高反射薄膜在真空与大气环境下的激光损伤特性[J].强激光与粒子束,2009,21(12). |
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| 作者姓名： | 马平 陈松林 胡建平 王震 邵建达 |
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| 作者单位： | 1. 中国科学院 上海光学精密机械研究所, 上海 201800;2. 成都精密光学工程研究中心， 成都 610041；3. 中国科学院 研究生院， 北京 100039 |
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| 摘 要： | 建立了光学元件在真空环境下的激光损伤测量系统,采用电子束蒸发和离子辅助技术制备了Hf2/SiO2高反射薄膜。对不同工艺制备的薄膜在真空与大气环境下的1 064 nm波长的激光损伤阈值进行了测量，对薄膜的损伤形貌进行了观测。对薄膜的损伤特性研究分析结果表明：薄膜在真空环境中的损伤阈值相对大气环境中有明显下降，其1∶1测试和R1测试损伤阈值下降约30%;两种环境中的薄膜损伤特性也不同,真空环境中损伤阈值的下降可能与热传导的不同有关。
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| 关 键 词： | 薄膜光学 激光损伤 大气环境 真空环境 高反射薄膜 |
| 收稿时间： | 1900-01-01; |
Laser induced damage of high reflective coatings prepared by different deposition methods in vacuum and air |
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| ma ping,,chen songlin,hu jianping,wang zhen,shao jianda.Laser induced damage of high reflective coatings prepared by different deposition methods in vacuum and air[J].High Power Laser and Particle Beams,2009,21(12). |
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| Authors: | ma ping chen songlin hu jianping wang zhen shao jianda |
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| Institution: | 1. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;2. Chengdu Fine Optical Engineering Research Center, Chengdu 610041, China;3. Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | The vacuum laser damage experimental facility was established. The samples of Hf22/SiO2 high reflective coatings were prepared by electron beam evaporation and ion assisted technology. The laser induced damage thresholds(LIDT) of samples were determined.The damage behaviors of the samples in vacuum and air environment were different. The results showe that the 1∶1 and R∶1 LIDTs of coatings in vacuum decreased about 30% compared with those inair, which might be caused by different thermal diffusion processes. |
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| Keywords: | film optics laser induced damage vacuum air high reflective coatings |
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