Abstract: | The backscattering coefficient of low–medium energy electron beams (from 250 to 10 000 eV) impinging on C/Al double layered thin films was investigated by a Monte Carlo simulation. The aim of the research was to study the behaviour of the backscattering coefficient as a function of the beam primary energy and the thicknesses of the two layers. The backscattering coefficient as a function of the primary energy presents features that can be used to evaluate the thicknesses of the two layers. Copyright © 2006 John Wiley & Sons, Ltd. |