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Monte Carlo simulation of low–medium energy electrons backscattered from C/Al double layer thin films
Abstract:The backscattering coefficient of low–medium energy electron beams (from 250 to 10 000 eV) impinging on C/Al double layered thin films was investigated by a Monte Carlo simulation. The aim of the research was to study the behaviour of the backscattering coefficient as a function of the beam primary energy and the thicknesses of the two layers. The backscattering coefficient as a function of the primary energy presents features that can be used to evaluate the thicknesses of the two layers. Copyright © 2006 John Wiley & Sons, Ltd.
Keywords:Monte Carlo simulation  electron backscattering  thin films
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