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CoFe_2O_4薄膜厚度对其微结构和磁性能的影响
引用本文:张亚磊,杨成韬,于永杰,解群眺.CoFe_2O_4薄膜厚度对其微结构和磁性能的影响[J].电子元件与材料,2010,29(2).
作者姓名:张亚磊  杨成韬  于永杰  解群眺
作者单位:电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054
基金项目:国家“973”计划资助项目(No.51613Z)
摘    要:以铁和钴的硝酸盐为主要原料,采用sol-gel旋涂法在Si(001)基片上制备了不同厚度的CoFe2O4(CFO)薄膜。研究了薄膜厚度对其结构、形貌及磁性能的影响。结果表明:随着其厚度的增大,薄膜的结晶度变好,薄膜晶粒度逐渐增大到70nm。Ms随着薄膜厚度的增大先增大后减小;Hc的变化规律和Ms相反。当薄膜厚度为800nm时,Ms达到最大值59.2A·m2/kg,此时Hc最小为106.7kA/m。该薄膜具有高度的平行各向异性。

关 键 词:sol-gel旋涂法  CFO薄膜厚度  微结构  磁性能

Effects of thickness for CoFe_2O_4 thin films on their microstructure and magnetic properties
ZHANG Yalei,YANG Chengtao,YU Yongjie,XIE Quntiao.Effects of thickness for CoFe_2O_4 thin films on their microstructure and magnetic properties[J].Electronic Components & Materials,2010,29(2).
Authors:ZHANG Yalei  YANG Chengtao  YU Yongjie  XIE Quntiao
Institution:State Key Laboratory of Electronic Thin Films and Integrated Devices;University of Electronic Science and Technology of China;Chengdu 610054;China
Abstract:Using nitrate of iron and cobalt as main raw materials, CoFe2O4 (CFO) thin films were prepared on Si(001) substrates via the sol-gel spin-coating method. Effects of thickness for the thin films on their microstructure, morphology and magnetic properties were studied. The results indicate that with increase of the thickness, the crystallinity of the thin films gets better and the crystallites of the CFO thin films increase gradually to 70 nm. Ms firstly increase and then decrease with increase of the thickne...
Keywords:sol-gel spin-coating method  thickness of CFO thin film  microstructure  magnetic property  
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