An analytical depth resolution function for the MRI model |
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| Authors: | Y. Liu S. Hofmann J. Y. Wang |
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| Affiliation: | 1. Department of Physics, Shantou University, , Shantou, 515063 Guangdong, China;2. Max Planck Institute for Intelligent Systems (formerly MPI for Metals Research), , D‐70569 Stuttgart, Germany |
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| Abstract: | The mixing roughness information depth model is frequently used for the quantification of sputter depth profiles. In general, the solution of the convolution integral for any kind of in‐depth distributions is achieved by numerical methods. For a thin delta layer, an analytical depth resolution function is presented, which enables a simple and user‐friendly quantification of measured delta layer profiles in AES, XPS and SIMS. Copyright © 2013 John Wiley & Sons, Ltd. |
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| Keywords: | depth profile depth resolution function response function |
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