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宽波段的类金刚石薄膜光学窗口
引用本文:白婷,刘晶儒,叶景峰,王晟,叶锡生.宽波段的类金刚石薄膜光学窗口[J].强激光与粒子束,2006,18(10):1629-1633.
作者姓名:白婷  刘晶儒  叶景峰  王晟  叶锡生
作者单位:西北核技术研究所, 西安 710024
基金项目:国家863计划项目资助课题
摘    要: 介绍了实用化宽波段光学镀膜窗口的研制过程,研制的光学窗口实现了从可见至远红外波段使用同一光学器件工作的目标,主要波段透过率在70%以上。该产品膜层均匀性优于95%,可以抵抗潮热、温度变化等恶劣环境,可耐受高功率的红外激光辐射,通过了GJB2485—95《光学膜层通用规范》和Q/AF20087—2003《宽波段军用光学镀膜窗口规范》的标准检测。

关 键 词:宽波段光学窗口  类金刚石薄膜  脉冲激光淀积  均匀性
文章编号:1001-4322(2006)10-1629-05
收稿时间:2006-06-15
修稿时间:2006-09-15

Development of diamond like carbon film coated window with wide spectral transmission
BAI Ting,LIU Jing-ru,YE Jing-feng,WANG Sheng,YE Xi-sheng.Development of diamond like carbon film coated window with wide spectral transmission[J].High Power Laser and Particle Beams,2006,18(10):1629-1633.
Authors:BAI Ting  LIU Jing-ru  YE Jing-feng  WANG Sheng  YE Xi-sheng
Institution:Northwest Institute of Nuclear Technology, P.O.Box 69-26, Xi’an 710024, China
Abstract:The development of diamond like carbon(DLC) film coated optical windows with wide spectral transmission is presented in this paper. This DLC coated window can be used as an optical window in the spectral range of 0.53~12.00 μm with the transmission of higher than 70% in most of the spectral band. The uniformity of the film is better than 97% with the area of 60 mm. The optical performance and environment adaptability of the DLC coated window are also tested. It can not only work well in damp, hot or cold environment but also tolerate infrared high power lasers. The windows have been tested by “general specification for optical coatings” (GJB2485—95) and “specification for the coated window with wide spectral transmission”(Q/AF20087—2003).
Keywords:Wide spectral transmission coated window  DLC film  Pulsed laser deposition  Uniformity
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