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Effect of Ampoule Rotation on Growth of InGaAs Ternary Bulk Crystals from Solution
Authors:Yasuhiro Hayakawa  Masahiko Ando  Tadanobu Koyama  Masashi Kumagawa  Tetsuo Ozawa  Miyuki Masaki  Katsumi Takahashi
Abstract:InxGa1-xAs (x = 0.045) ternary bulk crystals were grown on GaAs seeds from an In–Ga–As solution by the temperature-difference method modified to rotate a growth ampoule. The effect of ampoule rotation on the profiles of the composition and the growth rate were investigated. The In compositional profiles were uniform irrespective of the ampoule rotation. On the other hand, the growth rate at the center of the crystal increased from 40 μm/h at 0 rpm to 55 μm/h at 100 rpm. The profile of growth rate changed from concave to convex toward the seed due to the ampoule rotation. Flow patterns and compositional profiles in the solution were simulated by solving four equations: Navier-Stokes, continuity, energy, and solute diffusion. The ampoule rotation enhanced the transportation of As component from the GaAs feed toward the seed at the central region in the solution. This led to the increase of the growth rate.
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