| 光学膜层激光损伤阈值均匀性的实验研究 |
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| 引用本文： | 刘强,林理彬,甘荣兵,唐方元,扎西次仁. 光学膜层激光损伤阈值均匀性的实验研究[J]. 强激光与粒子束, 2003, 15(11): 1061-1064 |
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| 作者姓名： | 刘强 林理彬 甘荣兵 唐方元 扎西次仁 |
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| 作者单位： | 四川大学物理系,四川,成都,610064;四川大学物理系,四川,成都,610064;西藏大学数理系,西藏,拉萨,850000 |
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| 基金项目： | 国家自然科学基金资助课题(600880012)，国家教育部高校博士点专项科研基金资助课题。 |
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| 摘 要： | 镀制了多种氧化物介质薄膜。用R-on-1方法测定了膜层的激光损伤阈值。引入数据处理方法，对测试数据进行分析。结果表明，基片清洗后，若放置一段时间再镀膜，则会影响到镀膜后膜层损伤阈值的均匀性，但对损伤阈值自身大小没有影响。测试激光参数对阈值均匀性也有一定影响。
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| 关 键 词： | 氧化物介质 镀膜 损伤阈值 阈值均匀性 |
| 文章编号： | 1001-4322(2003)11-1061-04 |
| 收稿时间： | 2003-03-20 |
| 修稿时间： | 2003-03-20 |
Experiment study on the uniformity of damage threshold of oxide films |
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| liu qiang,lin li bin,gan rong bing,tang fang yuan,zha xi ci ren,. Experiment study on the uniformity of damage threshold of oxide films[J]. High Power Laser and Particle Beams, 2003, 15(11): 1061-1064 |
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| Authors: | liu qiang lin li bin gan rong bing tang fang yuan zha xi ci ren |
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| Affiliation: | 1. Department of Physics, Sichuan University, Chengdu 610064 , China;2. Department of Physics and Mathematics , Xizang University, Lasa 850000, China |
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| Abstract: | Using a new cleaning technology, K9 glass substrates were cleaned, and some single layer films were prepared with various oxide materials on the surface of the substrates using the electron beam evaporation technique. The laser induced damage thresholds of the film were got by using R on 1 test and the experiment repeatability is good. The experiment results show that the placement duration of the substrate after cleaning should influence the homogeneity of the damage threshold of the films, but do not influence the damage thresholds itself. To improve the homogeneity of the film thresholds, films are, as soon as possible, deposited after cleaning. Threshold uniformity is also influenced by laser parameters. |
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| Keywords: | Cleaning procedure Films Damage threshold Threshold uniformity. |
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