离子(N2+, N+)在氮辉光放电等离子体光辐射中的作用

采用氮辉光放电等离子体电子与重粒子综合的Monte Carlo模型,研究了离子(N2+，N+)与氮分子碰撞产生光辐射的强度分布及其 在氮辉光放电等离子体光辐射中的作用。两种离子产生的各种碰撞激发和辐射都分布在鞘层区内，光辐射强度向阴极方向逐渐 增加，且总强度随放电电压增加而增强。相对于电子产生的碰撞激发辐射，离子(N2+，N+)引起的辐射在阴极附近引起次最大 光强，且原子离子N+的作用较分子离子N2+大。当电压较低时，离子(N2+，N+)引起的辐射可以忽略。模拟结果很好解释了两 种典型的N2辉光放电光学发射谱的实验结果，为等离子体诊断研究中的光谱数据分析提供参考。

Role of ions (N2+, N+) in the optical emission in nitrogen glow discharge plasma

 Intensity distribution of optical emission caused by collisions between ions (N2+, N+) and nitrogen neutral ground-state molecular and the role of ions (N2+, N+)in the optical emission of nitrogen glow discharge plasma are investigated by a combined Monte Carlo model with electrons and the heavy particles. The various impact excitations and optical emissions produced by ions (N2+, N+) distribute in the cathode dark space and the light intensities gradually increase towards the cathode, and total intensities increase with the discharge voltage. Relative to impact excitations and emissions caused by electron, a secondary intensity maximum near the cathode is produced by the collisions between ions (N2+, N+) and molecule N2, and the effect of atomic ions N+ on the impact emission can be stronger than the molecular ions. When the voltage is rather low, the emission caused by the ions collisions can be disregarded. The simulating results offer a good explanation for the experimental data of optical emission spectroscopy under two typical kinds of N2 glow discharge and provide reference evidences for spectroscope data analysis in plasma diagnosis.