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Measurement technique for depth profiling in time-domain low-coherence interferometer |
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| Authors: | Ribun Onodera Shuhei Oshida Yukihiro Ishii |
| Institution: | 1. Department of Electronics, University of Industrial Technology, 4-1-1 Hashimotodai, Sagamihara, Kanagawa, 229-1196, Japan 2. Tokyo Seimitsu Co., Ltd., 2968-2 Ishikawa-machi, Hachioji, Tokyo, 192-0032, Japan 3. Department of Applied Physics, Tokyo University of Science, 1-3 Kagurazaka, Shinjuku, Tokyo, 162-8601, Japan |
| Abstract: | A measurement technique for depth profiling in a time-domain low-coherence interferometer has been proposed. The spatial variation of the optical path caused by a diffraction grating in the Littrow configuration produces a white-light interferogram. A one-dimensional charge-coupled device (1D-CCD) detector is used to measure the undersampled white-light interferogram. The position of the reflective boundary is calculated from the rate of phase change with spatial frequency, which is based on the sub-Nyquist sampling of the white-light interferogram in the frequency domain. |
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