| 微机械加工中恒温腐蚀系统的设计研究 |
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| 引用本文： | 罗伟栋,牛文成,张福海,那兴波.微机械加工中恒温腐蚀系统的设计研究[J].南开大学学报,2003,36(3):86-89,104. |
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| 作者姓名： | 罗伟栋 牛文成 张福海 那兴波 |
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| 作者单位： | 南开大学信息学院微电子学系，天津300071 |
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| 基金项目： | 天津市自然科学基金资助项目(003600611) |
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| 摘 要： | 本文设计了一个恒温腐蚀系统，用于微机械加工制作中的腐蚀工艺．系统装备了冷凝回流与加热搅拌装置，保证了腐蚀过程中，腐蚀液浓度的稳定与均匀；特殊设计的加热设备，提高了热量的利用效率．同时，采用内藏式温度传感器和基于模糊专家系统的温度控制算法，使腐蚀系统的温度控制更加精确、灵活．与传统水浴恒温相比，不仅使用方便，而且提高了腐蚀的效率与质量．
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| 关 键 词： | 腐蚀系统 恒温控制 模糊专家系统 |
| 文章编号： | 0465-7942(2003)03-0086-04 |
THE RESEARCH OF THE ETCHING SYSTEM WITH CONSTANT TEMPERATURE IN MEMS MANUFACTURE |
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| LUO Weidong,NIU Wencheng,ZHANG Fuhai,NA Xingbo.THE RESEARCH OF THE ETCHING SYSTEM WITH CONSTANT TEMPERATURE IN MEMS MANUFACTURE[J].Acta Scientiarum Naturalium University Nankaiensis,2003,36(3):86-89,104. |
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| Authors: | LUO Weidong NIU Wencheng ZHANG Fuhai NA Xingbo |
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| Abstract: | This paper designs an etching system with constant temperature for etching process in MEMS manufacture. The system is equipped with electromagnetic stirrer and ondensing system to keep the concentration of the etching solution invariable during the whole etching processes. Specially designed heating device is used to improve the efficiency of energy utility. In addition, the temperature control is made more precise and flexible due to the adoption of the hide-in temperature detector and temperature control algorithm based on the fuzzy expert system. Compared with the conventional constant temperature system soaking in the water, the system is easier to use. The quality and efficiency of etching is also improved. |
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| Keywords: | etching system constant temperature control fuzzy expert system |
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