无定形氢化碳薄膜的制备方法

无定形氢化碳(a-C∶H)薄膜由于具有许多独特的性质,近年米受到研究工作者们的嘱目。本文详细介绍了 a-C∶H 薄膜的各种制备方法,包括等离子体淀积法、离子束法、溅射法和化学汽相淀积法等,给出了某些典型的实验条件。文中还讨论了制备膜的性质及其与制备条件之间的关系,氢和氧含量以及掺杂对膜特性的影响。最后,展望了 a-C∶H 薄膜的应用前景。

PREPARATION METHODS OF AMORPHOUS HYDROGENATED CARBON THIN FILMS

Recently,amorphous hydrogenated carb6n (a-C:H)thin films are the focus of the research workers' attention because of their unique properties. The various preparation methods of a-C:H thin films,including plasma deposition,ion beam deposition,sputtering and chemical vapor deposition, were described in detail in this paper.Sone typical preparaticn condi- tions were given in this paper,too. Also,the properties of the resulting films,the relationship between he properties and the preparation conditions,the effects of the content tof hydrogen and oxygen and dopants on the film characteristics were discussed. At last,the applicability of a-C:H thin films is looked into the future.