| H型结构垂直腔面发射激光器 |
| |
| 引用本文： | 李雪梅,刘颖,姜秀英,王之岭,赵永生,杜国同,武胜利,王立军.H型结构垂直腔面发射激光器[J].中国激光,1998,25(1):18-20. |
| |
| 作者姓名： | 李雪梅 刘颖 姜秀英 王之岭 赵永生 杜国同 武胜利 王立军 |
| |
| 作者单位： | 吉林大学实验区集成光电子联合国家重点实验室，中国科学院长春物理所 |
| |
| 摘 要： | 报道了一种结构新颖的Ｈ型垂直腔面发射激光器。器件是由钨丝掩膜一次质子轰击和选择腐蚀相结合制备的，实验已实现在脉宽为２０μｓ，占空比为１１０的脉冲电流条件下的室温激射。
|
| 关 键 词： | 垂直腔面发射激光器，钨丝掩膜质子轰击，选择腐蚀 |
| 收稿时间： | 1996/10/29 |
Vertical cavity Surface emitting Lasers of H shape |
| |
| Li Xuemei,Liu Ying,Jiang Xiuying,Wang Zhiling,Zhao Yongsheng,Du Guotong.Vertical cavity Surface emitting Lasers of H shape[J].Chinese Journal of Lasers,1998,25(1):18-20. |
| |
| Authors: | Li Xuemei Liu Ying Jiang Xiuying Wang Zhiling Zhao Yongsheng Du Guotong |
| |
| Abstract: | A novel H shaped vertical cavity surface emitting laser is reported in this paper. The structure is obtained by H + implant using tungsten wires as the mask and the lift off etching technique. The current is conducted through regions between notchs and windows, then funneled into the GaAs active layer. In a preliminary experiment, at room temperature 0.1 duty cycle 20 μs width pulses operation has been realized. |
| |
| Keywords: | vertical cavity surface emitting laser bombardment using tungsten wires as the mask lift off etching technique |
| 本文献已被 CNKI 等数据库收录！ |
|
