Synthesis of iron silicides starting with Fe/Si multilayers

The iron silicides are considered key materials for silicon integrated optoelectronic devices. This report describes the synthesis of the iron silicides starting with e-beam evaporated multilayered Fe/Si samples. Samples with two chemical wavelengths were studied upon annealing and ion beam mixing. The characterization included X-ray diffraction, CEMS and Rutherford backscattering.