| 超光滑基片表面散射的数值研究 |
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| 引用本文： | 赵云,杨开勇.超光滑基片表面散射的数值研究[J].光学技术,2011,37(6):659-663. |
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| 作者姓名： | 赵云 杨开勇 |
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| 作者单位： | 国防科学技术大学光电科学与工程学院,湖南长沙,410073 |
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| 摘 要： | 以一阶微分散射理论为基础,从理论和模拟两个方面对超光滑基片表面的散射电磁场进行了数值研究.分析了s偏振光和p偏振光的微分散射随入射角和散射角的分布情况.研究发现,当入射角较大时,p偏振光在某个散射方向的微分散射为0,而无论入射角和散射角如何变化,s偏振光的微分散射均大于0.当用光散射法对超光滑基片进行表面测试时,相对于...
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| 关 键 词： | 光学检测 表面散射 微分散射 超光滑基片 |
Numerical study on surface scattering of super-smooth substrate |
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| ZHAO Yun
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YANG Kaiyong.Numerical study on surface scattering of super-smooth substrate[J].Optical Technique,2011,37(6):659-663. |
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| Authors: | ZHAO Yun YANG Kaiyong |
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| Institution: | ZHAO Yun,YANG Kaiyong(College of Optoelectronic Science and Engineering,National University of Defense Technology,Changsha 410073,Hunan,China) |
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| Abstract: | First-order perturbation theory is applied to calculate the surface scattering of substrate.Numerical study is described for calculating the angle-resolved scattering.The result finds that the optical factor of s-and p-polarization are different,when incident angle is large,the p-polarization scattering is zero at certain scattering angle,but s-polarization scattering is above zero whatever the incident and scattering angle is.When using the scattering method to measure the surface of substrate,s-polarizati... |
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| Keywords: | optical measurement surface scattering angle-resolved scattering super-smooth substrate |
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