| 透射式GaAs光电阴极AlGaAs/GaAs外延层在热应力作用下晶格弯曲的倒易点二维图研究 |
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| 引用本文： | 李晓峰,张景文,高鸿楷,侯洵. 透射式GaAs光电阴极AlGaAs/GaAs外延层在热应力作用下晶格弯曲的倒易点二维图研究[J]. 光子学报, 2002, 31(2): 200-204 |
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| 作者姓名： | 李晓峰 张景文 高鸿楷 侯洵 |
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| 作者单位： | 中国科学院西安光学精密机械研究所,光电子学研究室,西安,710068;中国科学院西安光学精密机械研究所,光电子学研究室,西安,710068;中国科学院西安光学精密机械研究所,光电子学研究室,西安,710068;中国科学院西安光学精密机械研究所,光电子学研究室,西安,710068 |
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| 摘 要： | 本文介绍了倒易点及其倒易点二维图的概念、倒易点形状及其倒易点二维图同晶格形变的关系,推导了热应力作用下双层膜发生弯曲的理论公式,阐明了晶格弯曲的原因和晶格倒易点二维图展宽的方向,分析了GaAs光电阴极AlGaAs/GaAs外延层的实测倒易点二维图,最后提出了降低AlGaAs/GaAs外延层中的热应力的技术途径.
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| 关 键 词： | AlGaAs GaAs X射线 晶格 外延 衍射 倒易点 |
| 收稿时间： | 2001-07-05 |
THE RECIPROCAL SPACE MAPPING OF CURVED AlGaAs/GaAs EPITAXIAL LAYER BONDED ON GLASS WINDOW OF TRANSPARENT GaAs PHOTOCATHODE |
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| Li Xiaofeng,Zhang Jingwen,Gao Hongkai,Hou Xun. THE RECIPROCAL SPACE MAPPING OF CURVED AlGaAs/GaAs EPITAXIAL LAYER BONDED ON GLASS WINDOW OF TRANSPARENT GaAs PHOTOCATHODE[J]. Acta Photonica Sinica, 2002, 31(2): 200-204 |
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| Authors: | Li Xiaofeng Zhang Jingwen Gao Hongkai Hou Xun |
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| Affiliation: | Xi’an Insitute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710068 |
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| Abstract: | This paper explained the concepts of reciprocal lattice point and reciprocal space mapping,illustrated the relationship between reciprocal lattice point and crystal dimension,the relationship between reciprocal space mapping and curvature of lattice,deduced the formula about curvature radius of bi-layer film,elaborated the extending direction and reason of reciprocal space mapping of curved lattice ,analysed the reciprocal space mapping of AlGaAs/GaAs epitaxial layer of GaAs photocathode.Besides the methods of degrading thermal strain were presented. |
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| Keywords: | AlGaAs GaAs X-ray Lattice Epitaxy Diffraction Reciprocal lattice point |
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