| BAIRD Ps-6电感耦合等离子发射光谱仪RF发生器的故障分析与检修 |
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| 引用本文： | 张文德,李煊,陆敏. BAIRD Ps-6电感耦合等离子发射光谱仪RF发生器的故障分析与检修[J]. 分析测试技术与仪器, 2003, 9(2): 122-127 |
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| 作者姓名： | 张文德 李煊 陆敏 |
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| 作者单位： | 中国石油化工股份有限公司上海石油化工研究院,上海,201208;中国石油化工股份有限公司上海石油化工研究院,上海,201208;中国石油化工股份有限公司上海石油化工研究院,上海,201208 |
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| 摘 要： | 在对RF(射频)发生器作简介的基础上，从联锁保护电路入手，选择了RF发生器不能进入点火前的准备状态、无输出功率、输出负载过重、不能形成等离子火炬、点不着火、自动调谐时点火困难和严重超载出现过热等七例有代表性的、已排除了的故障实例深入进行分析研究，提出了排除故障的思路与办法。
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| 关 键 词： | RF发生器 联锁保护电路 故障分析 检修 |
| 文章编号： | 1006-3757(2003)02-0122-05 |
| 收稿时间： | 2003-03-28 |
| 修稿时间： | 2003-03-28 |
The Faults Analysis and Solution of BAIRD Ps-6 Plasma Spectrometer RF Generator |
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| ZHANG Wen-de,LI Xuan and LU Min. The Faults Analysis and Solution of BAIRD Ps-6 Plasma Spectrometer RF Generator[J]. Analysis and Testing Technology and Instruments, 2003, 9(2): 122-127 |
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| Authors: | ZHANG Wen-de LI Xuan LU Min |
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| Affiliation: | Shanghai Petrochemical Research Institute of SINOPEC, Shanghai 201208, China;Shanghai Petrochemical Research Institute of SINOPEC, Shanghai 201208, China;Shanghai Petrochemical Research Institute of SINOPEC, Shanghai 201208, China |
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| Abstract: | Based on simple introduction of RF generator and started with interlock electrical diagram, 7 representative and already solved examples of RF generator no power output, over loading, before ignition being not able to get in ready, being not able to form the torch of PLSMA, ignition faulted, hardly igniter in auto tune, smoked with burnt smell etc, were analyzed and studied thoroughly. Solution ideas and ways were offered. |
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| Keywords: | RF generator inter-lock circuit faults analyzed solution |
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