| 软X射线（60—900eV）超薄膜的光学常数 |
| |
| 引用本文： | 曹健林,柳原美广.软X射线（60—900eV）超薄膜的光学常数[J].光学学报,1990,10(8):06-713. |
| |
| 作者姓名： | 曹健林 柳原美广 |
| |
| 作者单位： | 中国科学院长春光学精密机械研究所
(曹健林，陈星旦)，日本东北大学科学计测研究所
(柳原美广，山本正树)，日本东北大学科学计测研究所(波冈武) |
| |
| 摘 要： | 用反射率方法测定了软X射线波段(60～900eV)超薄膜的光学常数.反射率测量在同步辐射光束线上完成.对测量数据做非线性最小二乘曲线拟合得出光学常数,同时还精密确定了超薄膜的膜厚与薄膜与基板表面粗度的均方根值.文中介绍了样品制备、反射率测量、数据解析及误差分析的方法,并给出了C、Au、Pt超薄膜的相应结果.
|
| 关 键 词： | 软X射线 超薄膜 光学常数 反射率 |
| 收稿时间： | 1990/1/12 |
Optical constants of superthin films in the soft X-ray region (60-900eV) |
| |
| CAO JIANLIN CHEN XINGDAN.Optical constants of superthin films in the soft X-ray region (60-900eV)[J].Acta Optica Sinica,1990,10(8):06-713. |
| |
| Authors: | CAO JIANLIN CHEN XINGDAN |
| |
| Abstract: | The optical constants of superthin films have been obtained from the reflectance vs. angle of incidence measurements using synchrotron radiation in the 60-900eV soft X-ray region. Nonlinear least square curve fitting method is used for analyzing the measured data. Eesults are given for Samples of C, Au, and Pt prepared by ion-beam sputtering (IBS), and the film thickness, the rms roughness of both films and substrates are also determined. |
| |
| Keywords: | soft X-ray superthin films reflectance |
| 本文献已被 CNKI 维普 等数据库收录！ |
