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Low-resistance Ohmic contact on polarization-doped AIGaN/GaN heterojunction
Affiliation:[1]state Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China; [2]Department of Electrical & Computer Engineering, University of Kentucky, Lexington, KY40506, USA
Abstract:polarization, A1GaN, carder concentration, Ohmic contact
Keywords:polarization   A1GaN   carder concentration   Ohmic contact
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