Abstract: | The preparation of single crystal substrates of gadolinium gallium garnet as a typical example of a brittle material is described. The mechanical polishing with iron oxide and diamond as well as a mechano-chemical polishing procedure basing on SiO2/H3PO4 are investigated. Working damage is investigated by X-ray topography, double crystal spectrometry and selective etching. Results are discussed in the frame of a brittle fracture model of the abrasion process. |