| 高精度,大口径平面波像差标准—移相式数字平面干涉仪 |
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| 引用本文： | 陈进榜 陈道炯. 高精度,大口径平面波像差标准—移相式数字平面干涉仪[J]. 光学学报, 1995, 15(4): 80-485 |
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| 作者姓名： | 陈进榜 陈道炯 |
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| 作者单位： | 南京理工大学电光学院，安徽工学院 |
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| 基金项目： | 国防科工委专项科研基金 |
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| 摘 要： | 介绍研制成的一台移相式数字平面干涉仪，其孔径为φ２４５ｍｍ，用液面作基准标定并消除仪器的系统误差，准确度优于λ／５０（峰谷值，λ＝０．６３２８μｍ），利用计算机辅助干涉术，被测件口径可扩展到φ５００ｍｍ，该仪器将用于建立高精度，大孔径平面波像差标准。文中阐述了光学干涉仪，移相器及精度校核等问题。
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| 关 键 词： | 移相式 数字平面干涉 平面波像差标准 |
| 收稿时间： | 1993-11-16 |
High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer |
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| Chen Jinbang,Song Dezheng,Zhu Rihong,Wang Qing,Chen Lei. High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer[J]. Acta Optica Sinica, 1995, 15(4): 80-485 |
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| Authors: | Chen Jinbang Song Dezheng Zhu Rihong Wang Qing Chen Lei |
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| Abstract: | This paper describes a large aperture-high accuracy phase shifting digital flat interferometer which is a combination of optics,mechanics,electricity and algorithm.Its aperture is 245 mm and liquid surface is used as absolute flat to eliminate systemic error.The accuracy is better than λ/50 (λ= 0. 6328 μm peak-to-valley value). The tested aperture can be enlarged to 500 mm.This interferometer will be used as an optical flat standard instrument.The optical interfermeter,phase shifter and calibration of precision are discussed. |
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| Keywords: | interferometer phase shifting technique optical flat standard calibration of precision. |
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