Photoluminescence of Anisotropically etched silicon |
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| Authors: | TYa Gorbach GYu Rudko P S Smertenko S V Svechnikov MYa Valakh |
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| Institution: | (1) Institute of Physics of Semiconductors, Ukrainian Academy of Sciences, Prospekt Nauki 45, 252650 Kiev-28, Ukraine |
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| Abstract: | Visible room-temperature luminescence of Anisotropically Chemically Etched (ACE) silicon under  spontaneous chemical surface modification in HNO3:HF solution is reported. The material is investigated by SEM, AES, IR transmission and Raman scattering methods. |
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| Keywords: | 78 55 Hx 78 66 Li 81 60 Cp |
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