| 射频辉光放电等离子体的电探针诊断及数据处理 |
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| 引用本文： | 姚若河,池凌飞,林璇英,石旺舟,林揆训. 射频辉光放电等离子体的电探针诊断及数据处理[J]. 物理学报, 2000, 49(5): 922-925 |
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| 作者姓名： | 姚若河 池凌飞 林璇英 石旺舟 林揆训 |
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| 作者单位： | 汕头大学物理学系，汕头 515063 |
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| 基金项目： | 国家自然科学基金(批准号：19875033)资助的课题. |
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| 摘 要： | Langmuir探针是等离子体诊断的一个重要方法.对探针I-V曲线进行求解二次微商是获得等离子体中的电子能量分布函数的关键.由Fourier变换导出一个求解微商的数值解方法.克服了现有方法所存在的缺点.实现了对探针I-V曲线求解二次微商的精确、自动运算.测量了硅烷射频辉光放电等离子体的平均电子能量(温度)和浓度随放电功率的变化.关键词：
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| 关 键 词： | 射频辉光放电等离子体 电子探针诊断 数据处理 |
| 收稿时间： | 1999-10-09 |
THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS |
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| YAO RUO-HE,CHI LING-FEI,LIN XUAN-YING,SHI WANG-ZHOU,LIN KUI-XUN. THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS[J]. Acta Physica Sinica, 2000, 49(5): 922-925 |
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| Authors: | YAO RUO-HE CHI LING-FEI LIN XUAN-YING SHI WANG-ZHOU LIN KUI-XUN |
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| Abstract: | Langmuir probe is an important tool to diagnose the plasma in radio frequency (rf) glow discharge. A new method has been used to obtain the electron energy distribution function in plasma by the numerical differentiation of the I-V probe characteristic.This method is based on Fourier transform and could overcome the defects of other methods. In this way, the second derivative signal of Langmuir probe I-V characteristic is obtained automatically and accurately. The mean electron energy and electron concentrations in rf glow discharge plasma in silane were obtained by Langmuir probe. |
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