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A proposal of the method for determination of very thin overlayers structure by AES or XPS
Affiliation:1. School of Information Science and Engineering, Xiamen University, Xiamen, Fujian 361005, China;2. School of Mathematical Sciences, Xiamen University, Xiamen, Fujian 361005, China;1. Texas Children''s Fetal Center, Baylor College of Medicine, Houston, TX;2. Michael E. DeBakey Department of Surgery, Baylor College of Medicine, Houston, TX;3. Department of Obstetrics and Gynecology, Baylor College of Medicine, Houston, TX;4. Department of Pediatrics - Newborn Section, Baylor College of Medicine, Houston, TX;5. Clevand Clinic Fetal Center, Cleveland, OH
Abstract:A new approach is proposed in the application of AES (or XPS) to determination of the structure and total coverage of very thin overlayers of fixed structure.
Keywords:
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