On tertiary BOx± ions in HF-plasma SNMS |
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Authors: | H Jenett Vasile-Dan Hodoroaba |
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Institution: | Institut für Spektrochemie und angewandte Spektroskopie (ISAS), Bunsen-Kirchhoff-Strasse 11, Postfach 101352, D-44013 Dortmund, Germany, DE Bundesanstalt für Materialforschung und -prüfung (BAM), Unter den Eichen 87, D-12205 Berlin, Germany, DE
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Abstract: | The effect of plasma electron impact on negative secondary ions is investigated by example of a sputtered H3BO3/Cu powder pellet. O–, BO–, BO+, and B+ tertiary ions, fractured from strongly forward focussed secondary BO2 – ions, are identified by their kinetic energies. Since most of them are accepted by the ion optics, this process may affect quantification in HF-plasma SNMS. |
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