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On tertiary BOx± ions in HF-plasma SNMS
Authors:H Jenett  Vasile-Dan Hodoroaba
Institution:Institut für Spektrochemie und angewandte Spektroskopie (ISAS), Bunsen-Kirchhoff-Strasse 11, Postfach 101352, D-44013 Dortmund, Germany, DE
Bundesanstalt für Materialforschung und -prüfung (BAM), Unter den Eichen 87, D-12205 Berlin, Germany, DE
Abstract:The effect of plasma electron impact on negative secondary ions is investigated by example of a sputtered H3BO3/Cu powder pellet. O, BO, BO+, and B+ tertiary ions, fractured from strongly forward focussed secondary BO2 ions, are identified by their kinetic energies. Since most of them are accepted by the ion optics, this process may affect quantification in HF-plasma SNMS.
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