Screening of spherical moulds manufactured isotropically in plasma etching conditions |
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Authors: | Etienne Herth Djaffar Belharet Samson Edmond David Bouville Laurent Robert Franck Lardet-Vieudrun |
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Affiliation: | 1. Centre de Nanosciences et de Nanotechnologies, CNRS UMR 9001, Paris-Sud University, Université Paris-Saclay, Palaiseau, France;2. FEMTO-ST, Université de Franche Comté, UBFC, CNRS UMR, Besançon, France |
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Abstract: | Micro-moulding is a critical rapid prototyping process chain used for a wide range of applications. This study demonstrates that it is possible to manufacture mould at low excitation frequency plasma (380 kHz), on a silicon substrate using fluorinated chemistry. According to the mask aperture designed and process time, the cavities profile characteristics, depending on the plasma chemistry, were analysed to predict the degree of anisotropy and the curvature. We show the possibility of creating curvature shapes with a desirable conic constant k of 1.25. In particular, we highlighted the smallest aperture sizes are more attractive for replicating optical micro-lens arrays using silicon moulds. Otherwise, the largest aperture sizes gain more attention for optoelectronics, microsystems, and microfluidics applications. |
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Keywords: | modelling mould plasma chemistry silicon |
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