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| 微米亚微米有限凹槽衍射特性的实验研究 | |
| 引用本文： | 郑师海,李德华,陈岩松,戴伦. 微米亚微米有限凹槽衍射特性的实验研究[J]. 物理学报, 1996, 45(8): 1292-1296 |
| 作者姓名： | 郑师海 李德华 陈岩松 戴伦 |
| 作者单位： | 中国科学院物理研究所,北京100080;中国科学院物理研究所,北京100080;中国科学院物理研究所,北京100080;北京大学人工微结构与介观物理国家重点实验室,北京100871 |
| 基金项目： | 国家自然科学基金;北京市中关村地区联合分析测试中心资助的课题 |
| 摘 要： | 应用微电子制板技术、电子束扫描曝光和离子刻蚀技术研制成功微米、亚微米级宽度的凹槽结构,并对其进行了衍射特性的研究,实验测试数据表明了这些凹槽的明显的矢量衍射特性. |
| 关 键 词： | 微米 凹槽 光栅 衍射特性 |
| 收稿时间： | 1995-05-11 |
EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTH |
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| ZHENG SHI-HAI,LI DE-HUA,CHEN YAN-SONG and DAI LUN. EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTH[J]. Acta Physica Sinica, 1996, 45(8): 1292-1296 | |
| Authors: | ZHENG SHI-HAI LI DE-HUA CHEN YAN-SONG DAI LUN |
| Abstract: | In this paper, a group of concave grooves with micron and submicron width was designed and fabricated by using photolithography, electron-lithography and ion etching techniques, and their diffractive performance was investigated in experiment. The experimental measured data show that the grooves have the feature of vector's diffraction. |
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