High-resolution mass spectra of the residual gas in a metallic vacuum system

The mass spectra of the residual gas in a metallic vacuum chamber of capacity 3 l are studied with an MI-9303 high-resolution magnetic resonance mass spectrometer in the mass range 1–140 u. The experiments are carried out under four evacuation conditions in the pressure range P = 10⁻⁸–10⁻¹⁰ Torr, and almost all the mass peaks forming multiplets are resolved. It is shown that the multiplets with mass numbers M≤80 have, as a rule, a multicomponent structure and hydrogen is the basic component responsible for the total pressure in the chamber irrespective of evacuation conditions. Next in order of intensity in the mass spectra are, CH ₄ ⁺ , H²O⁺, CO⁺, and CO ₂ ⁺ peaks. Other lines in the residual gas spectra are largely due to various C-, H-, N-, and O-based compounds. In addition, the background mass spectrum involves Cl-and F-based compounds and noble gas isotopes. The multiplets with M > 80 often degenerate into a single hydrocarbon line.