| 电子通道花样分析技术的进展 |
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| 引用本文： | 廖乾初.电子通道花样分析技术的进展[J].电子显微学报,1999,18(2):223-233. |
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| 作者姓名： | 廖乾初 |
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| 作者单位： | 北京钢铁研究总院,北京,100081 |
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| 摘 要： | 本文对电子通道花样分析技术的原理和方法进行了评述。并讨论了在材料科学应用中选区电子通道花样分析技术的要点和展望。
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| 关 键 词： | 电子通道花样 摇摆电子束 选区尺寸 球差系数 |
| 文章编号： | 1000－6281(1999)02－0223－0233 |
Advances in the analysis technique of electron channeling pattern |
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| LIAO Qian-chu.Advances in the analysis technique of electron channeling pattern[J].Journal of Chinese Electron Microscopy Society,1999,18(2):223-233. |
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| Authors: | LIAO Qian-chu |
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| Abstract: | In the present paper,the principle and method for the analysis technique of electron channeling pattern have been reviewed.The key points and the prospect of selected area channeling pattern technique in the applicatiion of the material science have been also discussed. |
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| Keywords: | electron channeling pattern rocking beams selected area size spherical aberration coefficient |
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