光学薄膜损伤表面三维微观形貌的仿真与重构

通过对激光作用薄膜元件后的损伤过程和图像损伤特征进行分析与研究,借助光学薄膜损伤表面三维微观形貌的重构,揭示薄膜元件损伤机理.基于白光干涉显微原理,采集薄膜损伤表面的干涉显微三维云数据,运用Delaunay三角剖分法构建损伤表面的三角网格模型,通过可视化仿真,实现了损伤表面三维微观形貌的再现.结果表明:实验测试的Hf0...

Simulation and Reconstruction of 3D Microscopic Morphology of Damaged Optical Film Surface

In this study,the damage mechanism of thin film components is revealed by reconstructing the three-dimensional(3 D)micro-morphology of a damaged optical film surface and by analyzing and studying the damage process and image damage characteristics of thin film components after laser irradiation.The interference microscopic 3 D cloud data of the damaged thin film surface is collected based on the principle of white light interference microscopy.The triangular mesh model of the damaged surface is constructed using the Delaunay triangulation method.Moreover,the 3 D micro-topography of the damaged surface is reproduced through a visual simulation.The results show that the surface damage areas of HfO2 films tested in the experiments are pit-shaped.The damage morphology is irregular(i.e.,many bulges and cracks exist inside).In addition,the edge steepness greatly changes,and more burrs are observed.Compared with the reconstructed image,processing results of the VEECO Vision software,and test results of the Taylor-Hobson non-contact profiler,the reconstructed image can more intuitively and comprehensively reproduce the micro-morphology of a damaged surface.The results provide technical support for analyzing the morphology of the damaged surface and controlling the preparation process of films with high-damage threshold.