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Single-Source Precursors for the Chemical Vapor Deposition of Iron Germanides
Authors:Thomas Büttner  Dr. Oliver Janka  Dr. Volker Huch  Debabrata Dhara  Prof. Dr. Anukul Jana  Prof. Dr. David Scheschkewitz
Affiliation:1. Krupp-Chair for General, and Inorganic Chemistry, Saarland University, 66123 Saarbrücken, Germany;2. Inorganic Solid State Chemistry, Saarland University, 66123 Saarbrücken, Germany;3. Service Center X-ray Diffraction, Saarland University, 66123 Saarbrücken, Germany;4. Tata Institute of Fundamental Research, Centre for Interdisciplinary Sciences, Hyderabad, 500075 India
Abstract:Binary iron-germanium phases are promising materials in magnetoelectric, spintronic or data storage applications due to their unique magnetic properties. Previous protocols for preparation of FexGey thin films and nanostructures typically involve harsh conditions and are challenging in terms of phase composition and homogeneity. Herein, we report the first example of single source chemical vapor deposition (CVD) of FexGey films. The appreciable volatility of [Ge[Fe2(CO)8]2], [Cl2GeFe(CO)4]2 and Me₂iPr₂NHC ⋅ GeCl2 ⋅ Fe(CO)4 allowed for their application as precursors under standard CVD conditions (Me₂iPr₂NHC=1,3-diisopropoyl-4,5-dimethylimidazol-2-ylidene). The thermal decomposition products of the precursors were characterized by TGA and powder XRD. Deposition experiments in a cold-wall CVD reactor resulted in dense films of FexGey. During the optimization of synthetic conditions for precursor preparation the new iron-germanium cluster Cl2Ge[Fe2(CO)8]Ge[Fe2(CO)8] was obtained in experiments with a higher stoichiometric ratio of GeCl2 ⋅ 1,4-dioxane vs. Fe2(CO)9.
Keywords:Chemical vapor deposition  germanium  Iron  Thin layers  Transition metal tetrelides
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