Simultaneous height and slope measurement of three-dimensional surfaces |
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| Authors: | H Bartelt EE Sicre |
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| Institution: | Physikalisches Institut der Universität Erlangen-Nürnberg, 8520 Erlangen, Fed. Rep. Germany |
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| Abstract: | A method based on structured illumination for a parallel measurement of height and slope of a three-dimensional surface is proposed. For illumination a two-dimensional pattern is projected under an oblique angle on the surface under test. An analysis of the observed pattern then allows to determine height and slope at a grid of discrete positions. |
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