Moiré alignment and positioning using a synthetic Fresnel zone plate |
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Authors: | Gheorghe T Olaru Toshimitsu Asakura |
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Institution: | Research Institute of Applied Electricity, Hokkaido University, Sapporo, Hokkaido 060, Japan |
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Abstract: | A new method for optical alignment and positioning is proposed. The actual position and shape of a spherical wavefront emerging from an optical system to be aligned are interferometrically encoded as “live” fringes similar to a Fresnel zone plate (FZP). Any in-plane misalignment and inaccurate positioning are detected in real-time as a unique moiré pattern by overlapping the “live” fringes and a synthetic interferometric FZP which is regarded as a reference grating. Experimental data are presented and future applications are suggested. |
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