Determination of the Rate Coefficient for the Heterogeneous Recombination of Chlorine Atoms in a Plasma Reactor by the Relaxation Technique

The relaxation technique was used to study the recombination kinetics of atoms in a chlorine plasma. It was revealed that time changes in the parameters of electronegative- and electropositive-gas plasmas under the conditions of pulsed discharge firing differed in character. A procedure was proposed for the treatment of experimental data with the aim of determining the rate coefficient for heterogeneous recombination of chlorine atoms under pulsed discharge excitation. A numerical value for the coefficient of heterogeneous recombination of chlorine atoms on glass was obtained for pure chlorine and chlorine–oxygen plasmas.