Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide |
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| Authors: | Diebold Roger M Clarke David R |
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| Affiliation: | School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA 02138, USA. rdiebold@seas.harvard.edu |
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| Abstract: | We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS. |
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