Integral analysis of the flow dynamics and mass transfer in a wavy liquid film on a spinning disk |
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| Authors: | Doris Prieling Helfried Steiner Günter Brenn |
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| Affiliation: | Graz University of Technology, Institute of Fluid Mechanics and Heat Transfer, Inffeldgasse 25/F, A-8010 Graz, Austria |
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| Abstract: | In the present work the complex process of diffusion-controlled wet chemical etching of a rotating silicon wafer is analyzed in the framework of an unsteady integral boundary layer approximation. The obtained results reproduce the waviness and the associated enhancement of the mass transfer in the wavy region, and are in good agreement with experimental findings. (© 2012 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim) |
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